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                DPS系列干式螺桿真空泵

                DPS系列干式螺桿真空泵

                功????率:2.98~8.94KW

                氣????量:80~1800m3/hr

                參 數:≤1/≤0.1 Pa

                參 數:280~545KG

                參 數:≤68DB(A)

                立即咨詢 免費電話

                訂購熱線: 400 777 0802

                DPS系列干式螺桿真空泵特點:
                排氣路徑短,減少反應物沉積/Exhaust Path Is Short, Reduce The Deposition Of Reactants.
                ●干式螺旋真空泵相較于其他形式的真空泵,因氣體于泵浦內的傳輸路徑最短,更不易產生反應物沉積的現象/Comparing with other types of dry vacuum pump,DENAIR screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.
                線形密封性佳,泵浦性能最優/The Optimal Linear Sealing, The Pump Performance
                ●專利轉子密封線形,轉子密封性佳,轉子能以較大的嚙合間隙達到更快的抽氣效果。由于嚙合間隙較大,泵浦較不易因制程氣體沉積而卡死,轉子也較不易因麿耗而需更換/Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between.Pump rotor wesring and rotor jam by the process contamination can be reduced by larger allowable clearcance.
                結構簡單,故障率低,維修容易/Simple Structure, Low Fault Rate And Easy Maintenance
                ●螺旋式真空泵因需利用一對轉子互相嚙合達到密封效果,結構上不像其他形式的真空泵需要有中 間隔板的設計,降低轉子與隔板沉積卡死的風險。且因其結構單純,拆解維修也較容易,因此能 縮短維修時程,降低維修費用/Screw type vacuum is composed by a pair of screw rotor and isolation plates are required in different between rotors and isolation plates can also be avoided.Overhaul Hanbell dry pump is much easier than other type of dry pump,so the erpair time is shorter and the cost is saver.
                微電腦操作,遠端監控,保護周全/Microcomputer Operation, Remote Monitoring, Considerate Protection
                ●微電腦操控器提供真空泵浦更簡單的操作方式并能顯示泵浦完整的運轉狀態,方便使用者對泵浦 應用狀況進行調整,在泵浦產生問題前進行預防保養。遠端監控系統能提供使用者方便的監控工具,使用者不需到現場即能查詢泵浦之運轉狀況/Microprocessor controller provides lots of pump parameters for running status monitoring.Pump can be easily operated and monitored by the operation panel.Remote control software can help the customer monitor the pump running status remotely.
                性能優勢:
                ●專用冷卻液冷卻,避免了冷卻水可能對殼體造成腐蝕/Special cooling liquid cooling, to avoid the cooling water may cause corrosion to the hull.
                ●移動式操作界面,方便操作;顯示真空泵實際工作狀況,并可選中英兩種文字顯示,切實貼近客戶/Mobile operation interface, convenient operation; Display and the actual work of vacuum pump and can be selected to both languages, according to the real close to the customer.
                ●軍規電源接頭,安全方便/Catch the power connector, safe and convenient.
                ●氮氣加熱器,使真空泵更適應于CVD、PECVD等半導體制程/The nitrogen gas heater, make the vacuum pump is more suitable for CVD, PECVD and other semiconductor technique process.
                ●控制訊號及通訊信號接口,可對真空泵進行遠端監控/The control signals and communication signal interface, remote monitoring was carried out on the vacuum pump.
                型 號
                Model

                單位

                單機Pump Unit

                機組Pump Set

                DPS80 DPS160 DPS180 DPS602 DPS902 DPS1302 DPS1802
                抽速(50HZ/60HZ) L/min 1300/1600 2150/2600 2500/3000 8300/10000 12500/15000 17500/20000 25000/33300
                m³/hr 80/96 140/156 150/180 500/600 750/900 1050/1260 1500/1800
                cfm 48/57 82/92 88/105 294/353 441/530 618/742 883/1060
                終極壓力 Torr ≤7.5*10-3 ≤7.5*10-4
                mbar ≤1*10-2 ≤1*10-3
                Pa ≤1 ≤0.1
                馬達 頻率 HZ 50/60
                電壓 V 220~440
                功率 Hp 4 6 6 4+4 6+4 6+6 6+6
                KW 2.98 4.47 4.47 2.98+2.98 4.47+2.98 4.47+4.47 4.47+4.47
                連接 進氣口   NW50 ISO100 ISO160
                排氣口   NW40
                冷卻水 流量 L/min 3~7
                壓力 kg/cm2 2.0~4.0
                溫度 18~30 15~30
                接頭   RC3/82
                氮氣N2 壓力 Mpa 0.15~0.2/td>
                稀釋流量 L/min 0-60
                密封流量 L/min 0-20
                接頭   Swagelok1/42
                尺寸(L×W×H) mm 814×380×663 895×405×678 920×425×650 814×380×865 895×380×915 920×430×957 920×430×1030
                重量 kg 280 300 320 450 520 540 545
                噪音 dB(A) ≤68 ≤70 ≤70 ≤70 ≤70 ≤70 ≤70
                備注:1、以上噪音值為搭配水冷電機無外罩之噪音值。2、以上機型如裝隔音裝置可再有效降低噪音3~4分貝
                Note:1、above the noise value is with water-cooled motor no outer garment of noise value.2、the above models,such as
                sound insulation devioe can effectively redoue the noise 3-4db.
                控制界面   SEMI E73-0299
                室溫操作范圍 5~40
                最大操作濕度 RH 90%以上Above
                性能曲線

                干式螺桿真空泵性能曲線
                說明:

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                應用領域:
                ●醫療行業/The health care industry.
                ●照明行業/Lighting industry.
                ●各種分析儀器/A variety of analytical instruments.
                ●電子、半導體行業/Electronics, semiconductor industry.
                ●電力行業/The power industry.
                ●制冷行業/Refrigeration industry.
                采購 :DPS系列干式螺桿真空泵

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